Although it is supported, some best practices I have read recommend to separate the two apart - 1 master server and 1 media/vcb proxy server.
You could make the master server a virtual machine itself.
First off recommend the following versions of software to be installed:
NetBackup 6.5.4
VMware VCB 1.5 (ESX 3.5U2 or latest 3.5U4) / VCB 1.5.1 (vSphere or ESX4)
vCenter Server 2.5U4
However, it would seem that the File part of the backup option is where it causes the server to go into process problems.
I would increase logging to level 5 on the master server host properties.
Create the %PROGRAMFILES%/Veritas/NetBackup/logs/bpbkar/ directory
rerun the backup and check back in this log directory.
Also troubleshoot by limit the jobs in policy to 1.
Type 3 FullVM with File for incrementals, it might be doing the indexing of the files inside the vmdk backup, where it creates all the bpbkar32 processes. It has done the full snapshot copy to the staging area by this point.
I would recommend you dont have any Anti-Virus software running and/or realtime scanning on this server or at the least disabled,
If you can use the SAN method in the snapshot client options.
Here is a handy flowchart that helps outline what is going on.