Im currently doing NBU 7 VM backups, Daily INCR and weekly Fulls for Windows and Daily Fulls for LINUX guests.
Your ESX Environement needs to be 3.5 U2 min, and the VIC should be at least 2.5..
Also make sure the following directory exists
C:\Program Files\Veritas\NetBackup\online_util\fi_cntl... And before you attempt to do any backups, when you attempt to add a client it builds out a cache file, make sure this file has been built at least once for san based backups.
IF your only getting this error on a couple VM's check to make sure the disks arnt in Independent Mode.